SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Thin Solid Films

Volumn 415, Issue 1-2, 2002, Pages 21-31

Determination of residual stress in thin films: A comparative study of X-ray topography versus laser curvature method

(4) Zhao, Z B a Hershberger, J b Yalisove, S M c Bilello, J C c

a DELPHI CORPORATION (United States)

b ARGONNE NATIONAL LABORATORY (United States)

c UNIVERSITY OF MICHIGAN (United States)

Author keywords

Double crystal diffraction topography; Laser scanning; Stress; X ray diffraction

Indexed keywords

CONTINUUM MECHANICS; CRYSTAL LATTICES; RESIDUAL STRESSES; SCANNING; SUBSTRATES; X RAY DIFFRACTION;

LASER SCANNING TECHNIQUES (LST);

THIN FILMS;

EID: 0036669976 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00489-3 Document Type: Article

Times cited : (39)

References (31)

1
- 0024924679
- (1989) Int. Mater. Rev. A , vol.34 , pp. 53
- D'Heurle, F.M.¹

2
- 0024129196
- (1988) CRC Critical Rev. Solid State Mater. Sci. , vol.14 , pp. 225
- Doerner, M.F.¹ Nix, W.D.²

3
- 0027002459
- (1992) CRC Critical Rev. Solid State Mater. Sci. , vol.17 , pp. 547
- Windischmann, H.¹

4
- 0024056874
- (1988) Acta Metallurgica , vol.36 , pp. 2019
- Drory, M.D.¹ Thouless, M.D.² Evans, A.G.³

5
- 0004133128
- Springer, New York
- (1987) Residual Stress Measurement by Diffraction and Interpretation , pp. 117
- Noyan, I.C.¹ Cohen, J.B.²

6
- 0029221518
- (1995) CRC Critical Rev. Solid State Mater. Sci. , vol.20 , pp. 125
- Noyan, I.C.¹ Huang, T.C.² York, B.R.³

7
- 0000267915
- (1990) Ann. Rev. Mater. Sci. , vol.20 , pp. 365
- Fuoss, P.H.¹ Brennan, S.²

8
- 0031495525
- (1996) J. Vac. Sci. Technol. , vol.15 , pp. 345
- Malhotra, S.G.¹ Rek, Z.U.² Yalisove, S.M.³ Bilello, J.C.⁴

9
- 0005286966
- (1909) Proc. R. Soc. London Ser. A , vol.82 , pp. 1729
- Stoney, G.G.¹

10
- 0001525873
- (1989) J. Appl. Phys. , vol.66 , pp. 4262
- Von Preissig, F.J.¹

11
- 0005325053
- (1962) Phy. Lett. , vol.1 , pp. 104
- Renninger, M.¹

12
- 0005354222
- (1965) Z. Phys. , vol.19 , pp. 20
- Renninger, M.¹

13
- 0021202721
- (1984) Rev. Sci. Instrum. , vol.55 , pp. 107
- Kuo, C.L.¹ Emamian, M.² Bilello, J.C.³

14
- 0021170479
- (1984) J. Appl. Phys. , vol.55 , pp. 375
- Kuo, C.L.¹ Vanier, P.E.² Bilello, J.C.³

15
- 51649147216
- (1991) J. Electronic Mater. , vol.20 , pp. 819
- Tao, J.¹ Lee, L.H.² Bilello, J.C.³

16
- 0017959830
- (1978) J. Appl. Phys. , vol.49 , pp. 2423
- Sinha, A.K.¹ Levinstein, H.J.² Smith, T.E.³

17
- 0021405876
- (1984) J. Appl. Phys. , vol.55 , pp. 2874
- Pan, J.T.¹ Blech, I.²

18
- 0023312081
- (1987) IEEE Trans. Electron Devices , vol.34 , pp. 689
- Flinn, P.A.¹ Gardner, D.S.² Nix, W.D.³

19
- 0005296376
- (1993) J. Appl. Phys. , vol.73 , pp. 7344
- Witvrouw, A.¹ Spaepen, F.²

20
- 0001184314
- (1994) J. Appl. Phys. , vol.75 , pp. 1530
- Geisz, J.F.¹ Kuech, T.F.² Lagally, M.G.³

21
- 36449005943
- (1991) J. Appl. Phys. , vol.70 , pp. 3521
- Volkert, C.A.¹

22
- 0000985523
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 2914
- Cuthrell, R.E.¹ Mattox, D.M.² Peeples, C.R.³ Dreike, P.L.⁴ Lamppa, K.P.⁵

23
- 0002658882
- (1989) Mat. Res. Symp. Poc. , vol.130 , pp. 41
- Morrison, D.J.¹ Jones, J.W.² Was, G.S.³ Mashayekhi, A.⁴ Hoffman, D.W.⁵

24
- 0031339431
- S.M. Yalisove, B.L. Adams, J.S. Im, Y. Zhu, F.R. Chen (Eds.), Polycrystalline Thin Films - Structure, Texture, Properties and Applications III, Boston, USA, March 31-April 4, 1997
- (1997) Materials Research Society Symposium Proceedings , vol.472 , pp. 299
- Gergaud, P.¹ Labat, S.² Yang, H.³ Bottger, A.⁴ Sandstrom, P.⁵ Svedberg, E.⁶ Mittermejer, E.J.⁷ Sundgren, J.E.⁸ Thomas, O.⁹

25
- 0032203536
- (1998) J. Mat. Res. , vol.13 , pp. 3027
- Kim, J.G.¹ Yu, J.²

26
- 36849104521
- (1973) J. Appl. Phys. , vol.44 , pp. 534
- Brantley, W.A.¹

27
- 0029369521
- (1995) Thin Solid Films , vol.266 , pp. 52
- Adams, D.P.¹ Parfitt, L.J.² Bilello, J.C.³ Yalisove, S.M.⁴ Rek, Z.U.⁵

28
- 0003814373
- McGraw-Hill, Inc, New York
- (1990) Microchip Fabrication - A Practical Guide to Semiconductor Processing, second ed. , pp. 45-62
- Van Zant, P.¹

29
- 0004204965
- Noyes Publication, Park Ridge
- (1990) Handbook of Semiconductor Silicon Technology
- O'Mara, W.C.¹ Herring, R.B.² Hunt, L.P.³

30
- 0347138189
- (1999) Philos. Trans. R. Soc. , vol.357 , pp. 2681
- Zhao, Z.B.¹ Rek, Z.U.² Bilello, J.C.³

31
- 0000647026
- (1995) J. de Physique (IV Colloque) , vol.5 , Issue.C8 , pp. 665
- Grummon, D.S.¹ Hou, L.² Zhao, Z.B.³ Pence, T.J.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.