Development of electron source for Auger electron spectroscopy in scanning probe microscope systems

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 7 B, 2002, Pages 4943-4947

  Miyatake, Yutaka ^a,b   Nagamura, Toshihiko ^b   Hattori, Ken ^a   Kanemitsu, Yoshihiko ^a   Daimon, Hiroshi ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b Japan Science and Technology Agency   (Japan)

Author keywords

Auger electron spectroscopy; Development of instrument; Element analysis; Field emission; Scanning Auger microscopy; Scanning tunneling microscopy

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRIC FIELD EFFECTS; ELECTRON EMISSION; ELECTRON ENERGY ANALYZERS; FIELD EMISSION CATHODES; GRAPHITE; SCANNING TUNNELING MICROSCOPY;

FIELD-EMISSION SOURCES;

SURFACE TOPOGRAPHY;

EID: 0036657150     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4943     Document Type: Conference Paper

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