Influence of thickness on oxygen-sensing properties of TiO2 thin films on Al2O3

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 7 A, 2002, Pages 4655-4658

  Zheng, Liaoying ^a   Xu, Tingxian ^a   Li, Guorong ^b   Yin, Qinrui ^b  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

^b TIANJIN UNIVERSITY   (China)

Author keywords

A F sensor; Al2O3; Substrate; Thin film; TiO2

Indexed keywords

ALUMINA; COMPOSITION EFFECTS; DIFFUSION IN SOLIDS; ELECTRIC CONDUCTIVITY OF SOLIDS; OXYGEN; SCANNING ELECTRON MICROSCOPY; THERMAL EFFECTS; THICKNESS MEASUREMENT; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

OXYGEN SENSING PROPERTIES; TITANIA;

TITANIUM DIOXIDE;

EID: 0036655923     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4655     Document Type: Article

References (7)