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Volumn 45, Issue 7, 2002, Pages 141-142+144+146
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Solutions for maximizing die yield at 0.13μm
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Author keywords
[No Author keywords available]
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Indexed keywords
ADHESION;
DIES;
ELECTRIC FIELD EFFECTS;
INTEGRATED CIRCUIT LAYOUT;
METALS;
OPTIMIZATION;
OXIDES;
SEMICONDUCTOR DIODES;
ELECTRICAL CHARGE EFFECTS;
METAL FILL;
PLANARITY;
TOTAL CHIP YIELD;
SEMICONDUCTOR DEVICE MANUFACTURE;
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EID: 0036649887
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (1)
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References (0)
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