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Volumn 20, Issue 4, 2002, Pages 1275-1283
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Effects of cross field diffusion in a low pressure high density oxygen/silane plasma
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL REACTORS;
DEPOSITION;
DIFFUSION;
FLOW OF FLUIDS;
MASS SPECTROMETRY;
OXYGEN;
PLASMA DENSITY;
POLYMERIZATION;
PRESSURE EFFECTS;
SILANES;
CROSS FIELD DIFFUSION;
DIFFUSION CHAMBER;
GLOBAL PLASMA EQUILIBRIUM;
LOW PRESSURE PLASMA;
PLASMAS;
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EID: 0036649081
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1481042 Document Type: Article |
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Times cited : (10)
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References (17)
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