Application of floatable oxide (FOx-12) for nanometer magnetic particle fabrication

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 811-817

  Jedrasik, P ^a   Hanson, M ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

Electron; Lithography; Magnetic; Nanometer; Particle; Proximity; Resist

Indexed keywords

CHARACTERIZATION; ELECTRON BEAM LITHOGRAPHY; ELECTRON SCATTERING; ION BEAM LITHOGRAPHY; ION BEAMS; MAGNETIC MATERIALS; MAGNETIC PROPERTIES; NANOSTRUCTURED MATERIALS; THIN FILMS;

MAGNETIC PARTICLES;

PHOTORESISTS;

EID: 0036643655     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00500-2     Document Type: Conference Paper

References (8)

1. Submicron patterning of thin cobalt films for magnetic storage
2. Physical and magnetic properties of submicron lithographically patterned magnetic islands
3. Effect of magnetocrystalline anisotropy in single-domain polycrystalline cobalt islands
4. Magnetic force microscopy of single-domain single crystal iron particles with uniaxial surface anisotropy
5. Magnetic imaging by force microscopy with 1000 Å resolution
6. A magnetic force microscope using an optical lever sensor and its application to longitudinal recording media
7. Ultrahigh resolution magnetic force microscope tip fabricated using electron beam lithography