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Volumn 61-62, Issue , 2002, Pages 7-
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Next generation lithography: When, why, and at what cost?
a
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Author keywords
[No Author keywords available]
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Indexed keywords
COSTS;
MICROPROCESSOR CHIPS;
NANOTECHNOLOGY;
PHOTOLITHOGRAPHY;
SILICON WAFERS;
SEMICONDUCTOR INDUSTRY;
MICROELECTRONICS;
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EID: 0036643645
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-9317(02)00590-7 Document Type: Conference Paper |
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Times cited : (3)
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References (0)
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