An X-ray tomography facility for I.C. industry at STMicroelectronics Grenoble

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 1069-1075

  Bord, S ^a   Clement, A ^a   Lecomte, J C ^b   Marmeggi, J C ^c  

^a STMICROELECTRONICS   (France)

^b UPR 5031 CNRS ^*  (France)

^c CNRS   (France)

Author keywords

Industrial application; Inspection; Non destructive analysis; Radiography; Tomosynthesis; X ray

Indexed keywords

COMPUTERIZED TOMOGRAPHY; DATA ACQUISITION; FLIP CHIP DEVICES; IMAGE RECONSTRUCTION; INSPECTION; INTEGRATED CIRCUIT MANUFACTURE; NONDESTRUCTIVE EXAMINATION; PRINTED CIRCUIT BOARDS; SEMICONDUCTOR DEVICE MANUFACTURE; VISUALIZATION; X RAY ANALYSIS;

X-RAY TOMOGRAPHY;

MICROELECTRONICS;

EID: 0036643624     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00523-3     Document Type: Article

References (5)