Processing considerations with plasma immersion ion implantation

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 24-30

  Cheung, Nathan W ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Ion cut; Plasma damage; Plasma doping; Plasma implantation; SPIMOX

Indexed keywords

PLASMA APPLICATIONS; PLASMA SHEATHS; PROCESSING;

NON-PLANAR SURFACES;

ION IMPLANTATION;

ION IMPLANTATION;

EID: 0036642345     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00068-3     Document Type: Article

References (22)