Simulation of sheath and presheath dynamics in PIII

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 131-135

  Briehl, Boris ^a   Urbassek, Herbert M ^a  

^a University of Koblenz Landau   (Germany)

Author keywords

Plasma immersion ion implantation (PIII); Plasma simulation and modelling; Plasma source ion implantation (PSII)

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; CURRENT DENSITY; IONS;

MATRIX SHEATH;

COATING TECHNIQUES;

PLASMA TREATMENT;

EID: 0036641611     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00077-4     Document Type: Article

References (17)