Baseline variations near the nitrogen impurity vibrational bands in the infrared spectra of Czochralski silicon

Materials Science and Engineering: B

Volumn 95, Issue 1, 2002, Pages 33-35

  Shirai, Hiroshi ^a   Kashima, Kazuhiko ^a  

^a Nissei Bldg   (Japan)

Author keywords

Czochralski silicon; Nitrogen; Thermal donors

Indexed keywords

ABSORPTION SPECTROSCOPY; ANNEALING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; IMPURITIES; INFRARED SPECTROSCOPY; NITROGEN; SILICON; SINGLE CRYSTALS;

VIBRATIONAL BANDS;

CRYSTAL GROWTH FROM MELT;

EID: 0036641395     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00191-5     Document Type: Article

References (10)