Modelling and experiment of a silicon resonant pressure sensor

Analog Integrated Circuits and Signal Processing

Volumn 32, Issue 1, 2002, Pages 29-35

  Cui, Zheng ^a   Chen, Deyong ^b   Xia, Shanhong ^b  

^a RUTHERFORD APPLETON LABORATORY   (United Kingdom)

^b INSTITUTE OF ELECTRONICS   (China)

Author keywords

Computer simulation; MEMS design; Pressure sensor; Silicon resonator

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER AIDED SOFTWARE ENGINEERING; COMPUTER SIMULATION; DAMPING; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; SILICON; THIN FILMS;

PRESSURE SENSORS; SILICON RESONATORS;

RESONATORS;

EID: 0036641060     PISSN: 09251030     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1016067523514     Document Type: Article

References (5)

1. Resonant silicon sensors
2. Air and gas damping of quartz tuning forks
3. Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry
4. Performance of thermally excited resonators
5. Design of a single-crystal silicon-based micromechanical resonator using finite element simulations