Decomposition of SiH4 on the SA type stepped Si(100) surface

Surface Review and Letters

Volumn 9, Issue 3-4, 2002, Pages 1401-1407

  Katircioǧlu, Şenay ^a   Erkoç, Şakir ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

B3LYP; Decomposition; Density functional theory; SiH4; Silane; Stepped Si(100) surface

Indexed keywords

SILICON DERIVATIVE; SILICON HYDRIDE; UNCLASSIFIED DRUG;

ADSORPTION; ARTICLE; DECOMPOSITION; DENSITY; DISSOCIATION; HYDROGEN BOND; MOLECULAR DYNAMICS; SURFACE PROPERTY;

EID: 0036619794     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0218625x02003901     Document Type: Article

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