Fluid dynamics calculation of sputtering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 193, Issue 1-4, 2002, Pages 727-733

  Jakas, Mario M ^a  

^a UNIVERSIDAD DE LA LAGUNA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC WAVES; ELECTRIC EXCITATION; LOW TEMPERATURE EFFECTS; SPUTTERING; THERMAL CONDUCTIVITY; THERMODYNAMICS; VISCOSITY;

STANDARD THERMAL SPIKE THEORY (STST);

FLUID DYNAMICS;

EID: 0036609585     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00894-7     Document Type: Conference Paper

References (11)