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Volumn 371, Issue 2, 2002, Pages 133-138
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The effect of deposition rate on the microstructure of YBCO thin films prepared by inverted cylindrical magnetron sputtering
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Author keywords
Microstructure; Superconductivity; Thin film
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Indexed keywords
CRYSTAL DEFECTS;
CRYSTAL MICROSTRUCTURE;
DEPOSITION;
LATTICE CONSTANTS;
MAGNETRON SPUTTERING;
OPTIMIZATION;
PARAMETER ESTIMATION;
SUPERCONDUCTING TRANSITION TEMPERATURE;
SURFACE ROUGHNESS;
THERMODYNAMICS;
YTTRIUM BARIUM COPPER OXIDES;
THERMODYNAMIC GROWTH PARAMETERS;
SUPERCONDUCTING FILMS;
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EID: 0036604135
PISSN: 09214534
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4534(01)01077-2 Document Type: Article |
Times cited : (11)
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References (14)
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