Effect of target properties on deposition of lithium nickel cobalt oxide thin-films using RF magnetron sputtering

Journal of Power Sources

Volumn 108, Issue 1-2, 2002, Pages 239-244

  Kim, Duksu ^a   Kim, Mun Kyu ^a   Son, Jong Tae ^a   Kim, Ho Gi ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cathodes; Lithium nickel cobaltate; Microbatteries; RF magnetron sputtering

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CATHODES; CRYSTALLIZATION; ELECTROCHEMISTRY; FABRICATION; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; PRESSURE EFFECTS; SPUTTER DEPOSITION; THERMAL EFFECTS;

MICROBATTERIES;

THIN FILMS;

EID: 0036604129     PISSN: 03787753     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0378-7753(02)00025-3     Document Type: Article

References (10)