Laser deposition of (Sr,Ba)TiO3 films with metal-ethylenediaminetetraacetic acid complexes

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 5 A, 2002, Pages 3033-3038

  Nakamura, Atsushi ^a   Satoh, Ryo ^a   Ohshio, Shigeo ^a   Nambu, Nobuyoshi ^a   Saitoh, Hidetoshi ^a,b  

^a Chubu Chelest Co Ltd   (Japan)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

(Ba,Sr)TiO3; AFM; Epitaxy; Laser deposition; Metal EDTA complex; Spray dry; SrTiO3; X ray diffraction

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITION EFFECTS; CRYSTAL LATTICES; EPITAXIAL GROWTH; LATTICE CONSTANTS; ORGANIC ACIDS; PULSED LASER DEPOSITION; STOICHIOMETRY; STRONTIUM COMPOUNDS; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS;

SPRAY-DRIED TARGETS;

THIN FILMS;

EID: 0036578043     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.3033     Document Type: Article

References (5)