An emissive probe with a rhenium filament for measuring plasma potential in a radio frequency oxygen plasma

Review of Scientific Instruments

Volumn 73, Issue 5, 2002, Pages 2033-

  Wilson, E H ^a   Jeong, Jongtae ^a   Hershkowitz, N ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

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[No Author keywords available]

Indexed keywords

EID: 0036575498     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1469674     Document Type: Article

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