Photon irradiation effects under ion implantation into insulators and applications to optical material processing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 191, Issue 1-4, 2002, Pages 115-120

  Kishimoto, N ^a   Okubo, N ^b   Umeda, N ^b   Takeda, Y ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Absorption; Cu ion; Insulators; Surface morphology; Transmission electron microscopy; YAG laser

Indexed keywords

ABSORPTION SPECTROSCOPY; ATOMIC FORCE MICROSCOPY; ELECTRIC INSULATORS; ENERGY GAP; HEAVY IONS; ION IMPLANTATION; IRRADIATION; LIGHT ABSORPTION; NANOSTRUCTURED MATERIALS; PROTONS; SUBSTRATES; SURFACE TREATMENT; TRANSMISSION ELECTRON MICROSCOPY;

PHOTON IRRADIATION;

RADIATION EFFECTS;

EID: 0036573816     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00523-2     Document Type: Article

References (15)