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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 191, Issue 1-4, 2002, Pages 783-788

Radiation-induced densification of sol-gel SnO2:Sb films

(6) Canut, B a Teodorescu, V b Roger, J A a Blanchin, M G a Daoudi, K a Sandu, C a

a UNIVERSITÉ LYON 1 (France)

b NATIONAL INSTITUTE OF MATERIALS PHYSICS (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DENSIFICATION; DENSITY (SPECIFIC GRAVITY); DEPOSITION; DOPING (ADDITIVES); DRYING; ION BEAMS; ION IMPLANTATION; IRRADIATION; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON WAFERS; SOL-GELS; TARGETS; TIN COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

COLLISIONAL PROCESSES; SOL-GEL FILMS;

THIN FILMS;

EID: 0036573774 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(02)00653-5 Document Type: Article

Times cited : (10)

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