Ion beam analysis of aluminium in thin layers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 630-635

  Healy, M J F ^a   Pidduck, A J ^b   Dollinger, G ^c   Gorgens, L ^c   Bergmaier, A ^c  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b QINETIQ   (United Kingdom)

^c TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

AlGaN; Aluminium; ERDA; Gallium aluminium nitride; NRA; RBS

Indexed keywords

ALUMINUM COMPOUNDS; GALLIUM NITRIDE; INDIUM COMPOUNDS; ION BEAMS; NUCLEAR PHYSICS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SAPPHIRE; SUBSTRATES;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

ALUMINUM;

EID: 0036570032     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01286-1     Document Type: Conference Paper

References (11)