Elastic recoil detection analysis on the ANSTO heavy ion microprobe

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 301-305

  Siegele, R ^a   Orlic, I ^a   Cohen, David D ^a  

^a AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

ERDA; IBA; Ion Microprobe

Indexed keywords

CARBON; ION BEAMS; OXYGEN; PARTICLE DETECTORS; SPUTTER DEPOSITION;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

HEAVY IONS;

EID: 0036569186     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01230-7     Document Type: Conference Paper

References (5)