Quantitative analysis of the oxygen content in TiO2 films deposited by electron-beam evaporation using 16O(α, α)16O resonant elastic scattering

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 514-517

  Jiang, J C ^a   Cheng, H S ^a   Li, B ^b   Wang, Z H ^b   Zhang, Z Q ^a   Zhang, F S ^b   Yang, F J ^a  

^a FUDAN UNIVERSITY   (China)

^b SHANGHAI INSTITUTE OF TECHNICAL PHYSICS   (China)

Author keywords

16O( , )16O RES; Electron beam evaporation; Filters; Oxygen depth profiling

Indexed keywords

BANDPASS FILTERS; DEPOSITION; ELECTRON BEAMS; ELECTRON RESONANCE; ELECTRON SCATTERING; EVAPORATION; OXYGEN; TITANIUM DIOXIDE;

ELECTRON-BEAM EVAPORATION; RESONANT ELASTIC SCATTERING;

THIN FILMS;

EID: 0036569069     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01315-5     Document Type: Conference Paper

References (9)