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Volumn 37, Issue 5, 2002, Pages 611-620
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Application of VUV laser harmonic radiation to the measurement of porous silicon dielectric function
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Author keywords
[No Author keywords available]
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Indexed keywords
HARMONIC GENERATION;
LASER APPLICATIONS;
LASER BEAMS;
POROUS SILICON;
REFLECTION;
SEMICONDUCTOR MATERIALS;
THIN FILMS;
ULTRAVIOLET SPECTROPHOTOMETERS;
LASER HARMONIC RADIATION;
ULTRAVIOLET RADIATION;
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EID: 0036568209
PISSN: 01438166
EISSN: None
Source Type: Journal
DOI: 10.1016/S0143-8166(01)00136-1 Document Type: Article |
Times cited : (1)
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References (26)
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