Special section on issues related to semiconductor manufacturing at technology nodes below 70 nm

IEEE Transactions on Semiconductor Manufacturing

Volumn 15, Issue 2, 2002, Pages 133-136

  Singh, Rajendra ^a   Doering, Robert R ^b   Koike, Hidetoshi ^c   Kim, Kinam ^d   Heyns, Marc ^e  

^a AMRL   (United States)

^b TEXAS INSTRUMENTS   (United States)

^c TOSHIBA CORPORATION   (Japan)

^d SAMSUNG Electronics   (South Korea)

^e IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036565353     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2002.999583     Document Type: Editorial

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