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Volumn 20, Issue 3, 2002, Pages 839-842
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On the mechanism of self-deceleration of the thin oxide film growth
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Author keywords
[No Author keywords available]
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Indexed keywords
FILM GROWTH;
OXIDATION;
OXIDES;
PLASMAS;
REACTION KINETICS;
SURFACE STRUCTURE;
TECHNOLOGY;
CABRERA THEORY;
MOTT THEORY;
SELF DECELERATION;
SURFACE OXIDATION TECHNOLOGY;
THIN OXIDE FILM GROWTH;
THIN FILMS;
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EID: 0036565347
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1471353 Document Type: Article |
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Times cited : (8)
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References (8)
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