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Volumn 20, Issue 3, 2002, Pages 702-706
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Ellipsometric method for real time control of thin film deposition on imperfect substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTIREFLECTION COATINGS;
ELLIPSOMETRY;
GLASS;
GRADIENT INDEX OPTICS;
LIGHT ABSORPTION;
MULTILAYERS;
OPTICAL FILTERS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
REFRACTIVE INDEX;
SEMICONDUCTOR DEVICE MODELS;
SPECTROPHOTOMETRY;
SUBSTRATES;
EFFECTIVE REFRACTIVE INDEX;
ELLIPSOMETRIC TRAJECTORY;
FLOAT GLASS;
GRADED INDEX ANTIREFLECTION COATING;
IMPERFECT SUBSTRATES;
REAL TIME CONTROL;
SPECTROPHOTOMETRY TRANSMISSION;
THIN FILMS;
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EID: 0036565337
PISSN: 07342101
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1464843 Document Type: Article |
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Times cited : (3)
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References (12)
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