Debris reduction for copper and diamond-like carbon thin films produced by magnetically guided pulsed laser deposition

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 3, 2002, Pages 744-747

  Tsui, Y Y ^a   Minami, H ^a   Vick, D ^a   Fedosejevs, R ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; LASER BEAMS; LASER PRODUCED PLASMAS; LASER PULSES; MAGNETIC FIELDS; PERMANENT MAGNETS; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SOLENOIDS; SUBSTRATES; THIN FILMS;

DEBRIS REDUCTION; MAGNETICALLY GUIDED PULSED LASER DEPOSITION; PARTICULATES; SOLENOID MAGNETS; VACUUM CHAMBER;

DIAMOND LIKE CARBON FILMS;

EID: 0036564767     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1467664     Document Type: Article

References (18)

1. A 25-μm-thick C tape at 99.7% purity
2. A 25-μm-thick Cu tape at 99.9% purity