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Volumn 11, Issue 2, 2002, Pages
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Using the normalized image log-slope Part 6: Development path
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Author keywords
[No Author keywords available]
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Indexed keywords
INTEGRAL EQUATIONS;
PHOTORESISTS;
PROBLEM SOLVING;
SPATIAL VARIABLES CONTROL;
CRITICAL DIMENSION CONTROL;
NORMALIZED IMAGE LOG-SLOPE;
IMAGE QUALITY;
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EID: 0036564685
PISSN: 1074407X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
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Times cited : (7)
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References (3)
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