Influence of growth parameters on properties of electroceramic thin films grown via MO-CVD

Materials Science in Semiconductor Processing

Volumn 5, Issue 2-3, 2002, Pages 105-114

  Padeletti, G ^a   Viticoli, M ^a,b   Cusma A ^a,c   Ingo, G M ^a   Santoni, A ^d   Loreti, S ^d   Minarini, C ^e   Viticoli, S ^a  

^a CNR   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

^c UNIVERSITY OF ROME TOR VERGATA   (Italy)

^d ENEA   (Italy)

^e ENEA CR Portici   (Italy)

Author keywords

High k; MO CVD; Thin films; Zirconium titanate

Indexed keywords

CRYSTALLOGRAPHY; DIELECTRIC MATERIALS; GROWTH (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; MORPHOLOGY; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY; ZIRCONIUM COMPOUNDS;

ELECTROCERAMICS;

THIN FILMS;

EID: 0036557723     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00090-2     Document Type: Conference Paper

References (17)

1. Ramakrishnan E.S., Cornett K.D., Shapiro G.H., Howung W.Y. J Electrochem Soc. 145:1998;358.
2. Balog M., Scheiber M., Mitchman M., Patai S. Thin Solid Films. 47:1977;109.
3. Shappir J., Anis A., Pinsky I. IEEE Trans Electron Devices. ED-33:1986;442.
4. Takeuchi M., Itoh T., Nagasaka H. Thin Solid Films. 51:1978;3.
5. Ma Y., Ono Y., Hsu T.S. Mater Res Soc Symp Proc. 567:1999;355.
6. Nishitsuji M., Uda T., Yokoyama T., Fujimoto K., Nishii K., Shibuya M., Kitagawa M., Tamura A. Semicond Sci Technol. 10:1995;1534.
7. Nakatsuka T., Itoh J., Yamamoto S., Yoshida T., Nishitsuji M., Uda T., Nishii K., Ishikawa O. IEEE Microwave Millimeter-Wave Monolithic Circuits Symp Dig. 5:1995;85.
8. Fujii E. IEDM Tech Dig 1992;267.
9. Myatsuji K., Ueda D. IEEE J Solid-State Circuits. 30:1995;979.
10. Dey S.K., Jan Lee J. IEEE Trans Electron Devices. ED-39:1992;1607.
11. Jones RE, Maniar P, Olowolafe JO, Campbell AC, Mogab CJ. IEDM Meeting Proceedings, Washington D.C 1991. p. 7.
12. Carrano J., Sudhama C., Chikarmane V., Lee J., Tasch A., Sheppard W., Abt N. IEEE Trans Ultrason Ferroelectrics Frequency Control. 38:1991;690.
13. McHale A.E., Roth R.S. J Amer Ceram Soc. 69:1986;827.
14. Victor P., Bharadwaja S.S.N., Nagaraju J., Krupanidhi S.B. Solid State Commun. 120:2001;379.
15. Thilakan P., Minarini C., Loreti S., Terzini E. Thin Solid Films. 388:2001;34.
16. de Keijser M., Dormans G.J.M., Larsen P.K. Paz de Araujo C., Scott J.F., Taylor G.W. Ferroelectric thin films: synthesis and basic properties. 1996;85 Gordon and Breach Publisher, The Netherlands.
17. Padeletti G, Cusmà A, Ingo GM, Santoni A, Loreti S, Minarini C, Viticoli M. Appl Phys A, in press.