Band structures of perovskite-like fluorides for vacuum-ultraviolet-transparent lens materials

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 41, Issue 4 A, 2002, Pages

  Nishimatsu, Takeshi ^a   Terakubo, Noriaki ^a   Mizuseki, Hiroshi ^a   Kawazoe, Yoshiyuki ^a   Pawlak, Dorota A ^b   Shimamura, Kiyoshi ^a   Fukuda, Tsuguo ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b Research Group of Integrated Circuits and System Design   (Poland)

Author keywords

ab initio; Band gap; Band structure; Lens; Lithography; Perovskite like fluoride; Stepper; VUV transparent

Indexed keywords

ENERGY GAP; LENSES; PEROVSKITE; PHOTOLITHOGRAPHY; SINGLE CRYSTALS; ULTRAVIOLET DEVICES; VACUUM;

LOCAL DENSITY APPROXIMATION (LDA);

FLUORINE COMPOUNDS;

EID: 0036544489     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.l365     Document Type: Article

References (14)