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Volumn 41, Issue 4 A, 2002, Pages
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Band structures of perovskite-like fluorides for vacuum-ultraviolet-transparent lens materials
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Author keywords
ab initio; Band gap; Band structure; Lens; Lithography; Perovskite like fluoride; Stepper; VUV transparent
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Indexed keywords
ENERGY GAP;
LENSES;
PEROVSKITE;
PHOTOLITHOGRAPHY;
SINGLE CRYSTALS;
ULTRAVIOLET DEVICES;
VACUUM;
LOCAL DENSITY APPROXIMATION (LDA);
FLUORINE COMPOUNDS;
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EID: 0036544489
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.41.l365 Document Type: Article |
Times cited : (160)
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References (14)
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