Integrated multi-environmental sensing-system for the intelligent data carrier

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 527-534

  Fujita, Takayuki ^a   Maenaka, Kazusuke ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Bipolar IC; Environmental sensor; Intelligent data carrier; Micromachining; Network; SOI

Indexed keywords

ACCELEROMETERS; ANALOG TO DIGITAL CONVERSION; DATA COMMUNICATION SYSTEMS; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; MICROPROCESSOR CHIPS; NETWORK PROTOCOLS; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; WEB BROWSERS;

HUMIDITY SENSOR; INTEGRATED MULTI ENVIRONMENTAL SENSING SYSTEM; INTELLIGENT DATA CARRIER SYSTEM; PERIPHERAL CIRCUITRY; PRESSURE SENSOR; TEMPERATURE SENSOR;

SENSOR DATA FUSION;

EID: 0036544377     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00819-6     Document Type: Conference Paper

References (4)

1. A generic multi-element microsystem for portable wireless applications
2. Research and development of the intelligent data carrier
3. A low temperature biochemically compatible bonding technique using fluoropolymers for biochemical microfluidic systems