Mapping nanometre-scale temperature gradients in patterned cobalt-nickel silicide films

Nanotechnology

Volumn 13, Issue 2, 2002, Pages 149-152

  Cannaerts, M ^a   Chamirian, O ^a,b   Maex, K ^a,b   Van Haesendonck, C ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COBALT COMPOUNDS; ELECTRIC RESISTANCE; GRAIN BOUNDARIES; SEMICONDUCTING FILMS; THERMAL GRADIENTS;

JOULE EXPANSION MICROSCOPY; THERMAL MAPPING;

NANOTECHNOLOGY;

EID: 0036540925     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/13/2/304     Document Type: Article

References (15)

1. Atomic force microscope