Silicon fabricated submicrometer stepper motor for microsurgical procedures

Journal of Microelectromechanical Systems

Volumn 11, Issue 2, 2002, Pages 154-160

  Peichel, David ^b,c   Marcus, David ^b   Rizq, Raed N ^b   Erdman, Aurthur G ^b   Robbins, William P ^a,b   Polla, Dennis L ^a,b  

^a IEEE

^b University of Minnesota   (United States)

^c MEDTRONIC INC   (United States)

Author keywords

Electrostatic devices; Piezoelectric transducer (PZT) ceramics; Stepper motor

Indexed keywords

ELECTRIC FREQUENCY CONTROL; ELECTRIC POTENTIAL; ELECTROSTATIC DEVICES; MEDICAL APPLICATIONS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SILICON WAFERS; SPEED CONTROL; SURGERY;

CENTIMETER TRAVEL RANGE; ELECTRICAL TO MECHANICAL POWER TRANSDUCER; ELECTROSTATIC CLAMPING MECHANISM; MICROSURGICAL PROCEDURES; SUBMICROMETER STEPPER MOTOR;

STEPPING MOTORS;

EID: 0036540095     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.993450     Document Type: Article

References (8)

1. Piezoelectric transducer materials
2. Dynamic piezoelectric translation devices
3. A linear piezoelectric stepper motor with sub-micrometer step size and centimeter travel range
4. Micro actuators using recoil of an ejected mass
5. Miniature linear motion actuator
6. A new inertia-based linear stepper motor for micro-surgical procedures
7. Foldable lens delivery system