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Volumn 91, Issue 7, 2002, Pages 4701-4709
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Nonlinear dynamics of a noncontacting atomic force microscope cantilever actuated by a piezoelectric layer
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPE CANTILEVERS;
EVOLUTION EQUATIONS;
FORCED VIBRATION;
FREQUENCY RESPONSE FUNCTIONS;
FREQUENCY SHIFT;
HAMILTON'S PRINCIPLE;
LAGRANGIAN;
LENNARD-JONES TYPE;
MICRO BEAMS;
MULTIPLE SCALES METHODS;
PERIODIC SOLUTION;
PERTURBATION ANALYSIS;
PIEZOELECTRIC LAYERS;
PIEZOELECTRIC LEAD ZIRCONATE TITANATES;
SILICON CANTILEVER BEAM;
SMALL DISPLACEMENT;
THIRD ORDER;
VIRTUAL WORKS;
VOLTAGE EXCITATIONS;
EQUATIONS OF MOTION;
FREQUENCY RESPONSE;
ATOMIC FORCE MICROSCOPY;
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EID: 0036535926
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1458056 Document Type: Article |
Times cited : (79)
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References (21)
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