Ion beam synthesis of buried CoSi2-structures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 188, Issue 1-4, 2002, Pages 174-178

  Vogel, T ^a   Meijer, J ^a   Stephan, A ^a   Weidenmuller U ^a   Dagkaldiran, U ^a   Kubsky, S ^a   Baving, P ^a   Becker, H W ^a   Rocken H ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Ion beam synthesis; Ion implantation; Ion projection; Silicide formation

Indexed keywords

ANNEALING; COBALT COMPOUNDS; CRYSTAL MICROSTRUCTURE; CURRENT DENSITY; ELECTRON MICROSCOPY; HIGH ENERGY PHYSICS; ION IMPLANTATION; OPTICAL MICROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STOICHIOMETRY;

ION BEAM SYNTHESIS; ION PROJECTIONS;

ION BEAMS;

EID: 0036533925     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01070-9     Document Type: Conference Paper

References (11)