Dry processing of silicon solar cells in a large area microwave plasma reactor

Solar Energy Materials and Solar Cells

Volumn 72, Issue 1-4, 2002, Pages 277-284

  Gazuz, V ^a   Feldrapp, K ^a   Auer, R ^a   Brendel, R ^a   Schulz, M ^a,b  

^a BAVARIAN CENTER FOR APPLIED ENERGY RESEARCH ZAE BAYERN   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Dry solar cell process: Plasma etching

Indexed keywords

ANTIREFLECTION COATINGS; DIFFUSION; DRY ETCHING; GLASS; METALLIZING; MICROWAVE DEVICES; PLASMA DEVICES; PLASMA ETCHING;

MICROWAVE PLASMA REACTORS;

SILICON SOLAR CELLS;

EID: 0036533163     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(01)00175-1     Document Type: Conference Paper

References (11)