Development of RTP for industrial solar cell processing

Solar Energy Materials and Solar Cells

Volumn 72, Issue 1-4, 2002, Pages 263-269

  Horzel, J ^a,c   Allebe, C ^a   Szlufcik, J ^a   Sivoththaman, S ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF WATERLOO   (Canada)

^c RWE POWER AG   (Germany)

Author keywords

C Si; Industrial processing; RTP; Screen printing; Selective emitter; UV enhancement

Indexed keywords

CRYSTAL DEFECTS; CRYSTALLINE MATERIALS; MICROELECTRONIC PROCESSING; SCREEN PRINTING;

RAPID THERMAL PROCESSING (RTP);

SILICON SOLAR CELLS;

SILK SCREEN PRINTING; SOLAR CELLS;

EID: 0036533140     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(01)00173-8     Document Type: Conference Paper

References (10)