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Volumn 72, Issue 1-4, 2002, Pages 165-171
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Comparative studies of EFG poly-Si grown by different procedures
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Author keywords
Carbon; Deep levels; Defects; Edge defined film fed growth; Oxygen; Polycrystalline silicon
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Indexed keywords
ANNEALING;
CRUCIBLES;
CRYSTAL GROWTH;
CRYSTAL IMPURITIES;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
GRAPHITE;
HIGH TEMPERATURE EFFECTS;
OXYGEN;
QUARTZ;
SUPERSATURATION;
EDGE-DEFINED FILM-FED GROWTH (EFG);
POLYSILICON;
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EID: 0036533099
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(01)00161-1 Document Type: Conference Paper |
Times cited : (17)
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References (13)
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