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Volumn 72, Issue 1-4, 2002, Pages 165-171

Comparative studies of EFG poly-Si grown by different procedures

Author keywords

Carbon; Deep levels; Defects; Edge defined film fed growth; Oxygen; Polycrystalline silicon

Indexed keywords

ANNEALING; CRUCIBLES; CRYSTAL GROWTH; CRYSTAL IMPURITIES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITE; HIGH TEMPERATURE EFFECTS; OXYGEN; QUARTZ; SUPERSATURATION;

EID: 0036533099     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(01)00161-1     Document Type: Conference Paper
Times cited : (17)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.