Epitaxial growth of oxide films (La-Ca-Mn-O and Y-Ba-Cu-O) by the facing-target sputtering technique

Journal of Crystal Growth

Volumn 237-239, Issue 1 4I, 2002, Pages 608-611

  Zhao, K ^a   Zhou, L Z ^a   Leung, C H ^a   Yeung, C F ^a   Fung, C K ^a   Wong, H K ^a  

^a CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

A3. Physical vapor deposition processes; B1. Perovskites; B2. Oxide superconducting materials

Indexed keywords

CRYSTAL LATTICES; CRYSTAL ORIENTATION; FILM GROWTH; LITHIUM COMPOUNDS; PHYSICAL VAPOR DEPOSITION; PRESSURE EFFECTS; SPUTTERING; SUBSTRATES; SUPERCONDUCTIVITY; THERMAL EFFECTS; THIN FILMS; X RAY DIFFRACTION ANALYSIS; YTTRIUM BARIUM COPPER OXIDES;

OXIDE FILMS;

EPITAXIAL GROWTH;

EID: 0036530521     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)01971-6     Document Type: Article

References (5)