Direct fusion bonding of silicon to polycrystalline diamond

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 482-486

  Wolter, S D ^a   Yushin, G N ^a   Okuzumi, F ^a   Stoner, B R ^b   Prater, J T ^c   Sitar, Z ^a  

^a North Carolina State University   (United States)

^b MCNC   (United States)

^c U S ARMY RESEARCH OFFICE   (United States)

Author keywords

Diamond thin films; Fusion bonding; Silicon on diamond

Indexed keywords

DIAMOND FILMS; FUSION REACTIONS; SILICON;

SCANNING ACOUSTIC MICROSCOPY;

POLYCRYSTALLINE MATERIALS;

DIAMOND; ELECTRICAL CONDUCTIVITY; FILM; FUSIBLE METAL; SILICON;

EID: 0036508059     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(01)00608-2     Document Type: Article

References (6)