Preparation of Co-Ti-N nanocomposite films

Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 59-62

  Chen, C C ^a   Shi, J ^a   Hashimoto, M ^a  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

Author keywords

(TixCo1 x)N; Co Ti N film; Nanocomposite; Phase separation

Indexed keywords

ANNEALING; COBALT; NITROGEN; SPUTTERING; TITANIUM;

NANOCOMPOSITE FILMS;

NANOSTRUCTURED MATERIALS;

COBALT; COMPOSITE; FILM; NITROGEN; PHASE SEPARATION; TITANIUM;

EID: 0036496030     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01571-7     Document Type: Article

References (11)