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Volumn 49, Issue 3, 2002, Pages 526-528
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Photonic high-frequency capacitance-voltage characterization of interface states in metal-oxide-semiconductor capacitors
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Author keywords
Capacitance voltage (C V); Interface states; MOS capacitor; Photonic characterization; Traps
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Indexed keywords
ELECTRIC CHARGE;
INTERFACES (MATERIALS);
PHOTONS;
POLYSILICON;
PHOTONIC CHARACTERIZATION;
MOS CAPACITORS;
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EID: 0036494611
PISSN: 00189383
EISSN: None
Source Type: Journal
DOI: 10.1109/16.987127 Document Type: Article |
Times cited : (31)
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References (12)
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