|
Volumn 73, Issue 3 II, 2002, Pages 1464-
|
X-ray optics fabricated by deep reactive ion etching (invited)
a b c |
Author keywords
[No Author keywords available]
|
Indexed keywords
|
EID: 0036494085
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1436546 Document Type: Conference Paper |
Times cited : (4)
|
References (0)
|