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Physica E: Low-Dimensional Systems and Nanostructures

Volumn 13, Issue 2-4, 2002, Pages 995-998

Chemically vapor deposited Si nanowires nucleated by self-assembled Ti islands on patterned and unpatterned Si substrates

(4) Kamins, T I a,b Williams, Stanley a Hesjedal, T b Harris, J S b

a HEWLETT PACKARD LABORATORIES (United States)

b Stanford University (United States)

Author keywords

Chemical vapor deposition; Nanostructures; Nanowires; Self assembly

Indexed keywords

CHEMICAL VAPOR DEPOSITION; LITHOGRAPHY; SELF ASSEMBLY; SEMICONDUCTING SILICON; SUBSTRATES; THERMAL EFFECTS;

SILICON NANOWIRES;

NANOSTRUCTURED MATERIALS;

EID: 0036492689 PISSN: 13869477 EISSN: None Source Type: Journal
DOI: 10.1016/S1386-9477(02)00287-4 Document Type: Conference Paper

Times cited : (16)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.