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Volumn 15, Issue 1, 2002, Pages 2-8
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A novel one step integration of edge-emitting laser diode with micro-elliptical lens using focused ion beam direct deposition
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Author keywords
Deposition; FIB; Integration; Laser diode; Micro cylindrical lens
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Indexed keywords
ION BEAM ASSISTED DEPOSITION;
MICROLENSES;
MICROOPTICS;
REFRACTIVE INDEX;
SILICA;
SURFACE PHENOMENA;
MICRO-ELLIPTICAL LENS;
SEMICONDUCTOR LASERS;
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EID: 0036474647
PISSN: 08946507
EISSN: None
Source Type: Journal
DOI: 10.1109/66.983438 Document Type: Article |
Times cited : (18)
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References (9)
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