Ion beam technologies in the semiconductor world (plenary)

Review of Scientific Instruments

Volumn 73, Issue 2 II, 2002, Pages 868-

  Poate, J M ^a   Saadatmand, K ^a  

^a AXCELIS TECHNOLOGIES   (United States)

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Indexed keywords

EID: 0036473116     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1428782     Document Type: Conference Paper

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