The BIE100 ECR ion source

Review of Scientific Instruments

Volumn 73, Issue 2 II, 2002, Pages 531-

  Xie, Dan Z ^a  

^a Berkeley Ion Equipment Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036472694     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1429320     Document Type: Conference Paper

References (0)