Sputtering of the aqueous solution of TiCl3 and the TiO2 formation

Journal of Materials Science

Volumn 37, Issue 3, 2002, Pages 595-601

  Suzuki, T ^a   Matsushima, Y ^a   Mori, Y ^a   Yamazaki, T ^a   Noma, T ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELECTRIC POTENTIAL; MOLECULES; MORPHOLOGY; PLASMA APPLICATIONS; PRESSURE; SPUTTER DEPOSITION; SUBSTRATES; TITANIUM DIOXIDE; WATER;

LIQUID LOSS; MICROCRYSTALLINE RUTILE STRUCTURE; TITANIUM TRICHLORIDE;

SOLUTIONS;

EID: 0036471446     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1013729910389     Document Type: Article

References (14)