Ion and neutral energy flux distributions to the cathode in glow discharges in Ar/Ne and Xe/Ne mixtures

Journal of Applied Physics

Volumn 91, Issue 3, 2002, Pages 1026-1030

  Capdeville, H ^a   Pedoussat C ^a   Pitchford, L C ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODE REGION; ENERGY FLUXES; HEAVY PARTICLES; HYBRID MODEL; MONTE CARLO SIMULATION; SPUTTERED ATOMS; SPUTTERING YIELDS;

ELECTRIC PROPERTIES; GLOW DISCHARGES; MIXTURES; MONTE CARLO METHODS;

CATHODES;

EID: 0036469903     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1430891     Document Type: Article

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